Dr. Barry Gotlinsky
Vice President SLS at Pall Corp
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 1 April 2009 Paper
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Semiconductors, Lithography, Microfluidics, Optical lithography, Particles, Manufacturing, Photoresist materials, Bridges, Ozone, Back end of line

Proceedings Article | 14 May 2004 Paper
Proc. SPIE. 5376, Advances in Resist Technology and Processing XXI
KEYWORDS: Lithography, Logic, Etching, Polymers, Metals, Chemistry, Photoresist materials, Semiconducting wafers, 193nm lithography, Industrial chemicals

Proceedings Article | 12 June 2003 Paper
Proc. SPIE. 5039, Advances in Resist Technology and Processing XX
KEYWORDS: Diffractive optical elements, Sensors, Digital filtering, Particles, Coating, Chemistry, Manufacturing, Thin film coatings, Semiconducting wafers, Bottom antireflective coatings

Proceedings Article | 23 June 2000 Paper
Proc. SPIE. 3999, Advances in Resist Technology and Processing XVII
KEYWORDS: Optical lithography, Contamination, Deep ultraviolet, Polymers, Particles, Nitrogen, Scanning electron microscopy, Photoresist materials, Semiconducting wafers, Tin

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