The need for absolute accuracy is increasing as semiconductor-manufacturing technologies advance to sub-65nm
nodes, since device sizes are reducing to sub-50nm but offsets ranging from 5nm to 20nm are often encountered. While
TEM is well-recognized as the most accurate CD metrology, direct comparison between the TEM data and in-line CD
data might be misleading sometimes due to different statistical sampling and interferences from sidewall roughness. In
this work we explore the capability of CD-AFM as an accurate in-line CD reference metrology. Being a member of
scanning profiling metrology, CD-AFM has the advantages of avoiding e-beam damage and minimum sample damage
induced CD changes, in addition to the capability of more statistical sampling than typical cross section metrologies.
While AFM has already gained its reputation on the accuracy of depth measurement, not much data was reported on the
accuracy of CD-AFM for CD measurement. Our main focus here is to prove the accuracy of CD-AFM and show its
measuring capability for semiconductor related materials and patterns. In addition to the typical precision check, we
spent an intensive effort on examining the bias performance of this CD metrology, which is defined as the difference
between CD-AFM data and the best-known CD value of the prepared samples. We first examine line edge roughness
(LER) behavior for line patterns of various materials, including polysilicon, photoresist, and a porous low k material.
Based on the LER characteristics of each patterning, a method is proposed to reduce its influence on CD measurement.
Application of our method to a VLSI nanoCD standard is then performed, and agreement of less than 1nm bias is
achieved between the CD-AFM data and the standard's value. With very careful sample preparations and TEM tool
calibration, we also obtained excellent correlation between CD-AFM and TEM for poly-CDs ranging from 70nm to
400nm. CD measurements of poly ADI and low k trenches are also reported, and both show good correlation to in-line
CD-SEM results.
Scatterometry is gaining popularity in recent years as it shows itself as a worthy contender among existing metrology
systems. Scatterometry provides fast, accurate and precise profile information, which is valuable for in-line process
control in production environment. Scatterometry applications widely adopted in IC fabs include poly gate ADI and AEI,
and shallow trench isolation depth measurements. Recently, the mobility enhancement by compressive strain at
source/drain is reported which improves greatly PMOS Idsat. In this work, we extend the application domain of
scatterometry technology to two-dimensional recessed Si profile used in strained source and drain (SSD) structures.
Complexity of SSD structures measurement by scatterometry requires the use of many parameters in modeling, which
hinders a stable library setup. Our approach in circumventing this issue is to identify the most sensitive parameters first
and then further reduce the number of variables through an effective medium approximation (EMA). This paper will
discuss the preparation, experiments, and results of the scatterometry measurements. The extracted data have been
compared with transmission electron microscopy results. Good correlation in depth and profile are observed. In addition,
we have performed repeatability test and fault detection checks and the trend chart indicates that our methodology is
very robust for in-line process monitor.
The scatterometry technology has been developed widely in the poly gate and resist patterning application for critical dimension (CD) process control. The advantages of this technology are good precision, short cycle time and multiple information outputs. To extend this application even further on spectroscopic ellipsometry (SE) based scatterometry, the spacer structure application becomes one promising goal. In this work, we use SE based scatterometry to demonstrate a two-dimensional profile of ultra thin spacer with post-etched structure as well as CD measurement of the spacer. A brief theory and measurement results taken by dense and isolate structure will be discussed in this paper. The cross-section of TEM and the spectra fitting by scatterometry are also collected at the same location and compared. It shows a high correlation between the two. Finally, an example of minispacer fault detection methodology and repeatability test on scatterometry is also presented to show the capability for volume production.
Film planarization process, of importance in semiconductor IC manufacturing, results from mutual competition between three forces: capillary, viscous, and gravitation. In this communication we compare, using simple geometric arguments, the order of magnitudes between the capillary force and a generalized centrifugal/gravitational force acting perpendicular to the surface. For patterns of sub-micron dimension and conditions similar to BPSG reflow and photo-resist coating we found that, within instrumental accessibility, the centrifugal term is much smaller than the capillary term. We conclude that the centrifugal/gravitational forces affect global patterns, i.e., with dimension larger than 1000 micrometers , while the capillary force dominates the sub-micro leveling process.
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