Mr. Beeri Nativ Profile

Beeri Nativ

at ASML Netherlands BV

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Publications (1)

Proceedings Article | 18 March 2019 Presentation

Quantifying global and local CD variation for an advanced 3D NAND layer (Conference Presentation)

Will Conley, Yaobin Feng, Zhiyang Song, Moran Guo, Jun He, Longxia Guo, Gang Xu, Simon Hsieh, James Bonafede, Stephen Hsu, Austin Peng, Jun Wei Lu, Victor Peng, Beeri Nativ, Fei Jia, Herman Nicolai, Ijen van Mil

Proceedings Volume 10961, 109610J (2019) https://doi.org/10.1117/12.2515725

KEYWORDS: Critical dimension metrology, Light sources, Semiconducting wafers, Yield improvement, Deep ultraviolet, Scanners, Control systems, Source mask optimization

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