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Behnam Akhavan
at Univ of Sydney
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 22 December 2015 Paper
Controlled deposition of plasma activated coatings on zirconium substrates
Proceedings Volume 9668, 96685V (2015) https://doi.org/10.1117/12.2202707
KEYWORDS: Plasma, Chemistry, Zirconium, Polymerization, Nitrogen, Refractive index, Plasma enhanced chemical vapor deposition, Polymer thin films, Thin film deposition, Polymers, Plasma systems, Ions
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