Dr. Benjamin Murray
Tech Director at KLA-Tencor Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 November 2002 Paper
E. Walter, M. Zach, F. Favier, B. Murray, K. Inazu, John Hemminger, Reginald Penner
Proceedings Volume 4807, (2002) https://doi.org/10.1117/12.456526
KEYWORDS: Metals, Molybdenum, Oxides, Copper, Scanning electron microscopy, Electrodes, Gold, Polymers, Particles, Nanowires

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