Dr. Benjamin Scherer
at E+H Process Solutions GmbH
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 26 February 2020 Presentation + Paper
Proceedings Volume 11285, 1128513 (2020) https://doi.org/10.1117/12.2543670
KEYWORDS: Photoacoustic spectroscopy, Sensors, Acoustics, Silicon, Semiconducting wafers, Signal to noise ratio, Infrared spectroscopy, Microelectromechanical systems

Proceedings Article | 21 January 2012 Paper
J. Herbst, B. Scherer, A. Ruf, J. Erb, A. Lambrecht
Proceedings Volume 8268, 82681Q (2012) https://doi.org/10.1117/12.908018
KEYWORDS: Sensors, Absorption, Quantum cascade lasers, Spectroscopy, Fiber lasers, Magnesium, Laser spectroscopy, Mid-IR, Absorbance, Infrared spectroscopy

Proceedings Article | 24 January 2011 Paper
J. Herbst, B. Scherer, F. Singer, J. Erb, A. Lambrecht, C. Rathke, S. Filip, J. Kappler, P. Fuchs, J. Koeth, J. Friedl, T. W. Schlereth, J. Semmel, S. Höfling, L. Worschech, A. Forchel
Proceedings Volume 7945, 79450J (2011) https://doi.org/10.1117/12.873765
KEYWORDS: Quantum cascade lasers, Absorption, Sensors, Spectroscopy, Laser spectroscopy, Fabry–Perot interferometers, Gases, Pulsed laser operation, Spectral resolution, Calibration

Proceedings Article | 24 January 2011 Paper
Benjamin Scherer, Hakim Hamid, Jürgen Rosskopf, Siamak Forouhar
Proceedings Volume 7945, 79450S (2011) https://doi.org/10.1117/12.875237
KEYWORDS: Sensors, Carbon monoxide, Oxygen, Absorption, Gases, Vertical cavity surface emitting lasers, Space operations, Calibration, Molecules, Nitrogen

Proceedings Article | 26 January 2009 Paper
Proceedings Volume 7222, 72220D (2009) https://doi.org/10.1117/12.807935
KEYWORDS: Oxygen, Hydrogen, Absorption, Helium, Laser spectroscopy, Absorption spectroscopy, Gases, Molecules, Doppler effect, Polarizability

Showing 5 of 6 publications
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