Dr. Benjamin Voelker
Optical Designer at Carl Zeiss AG
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 25 April 2008 Paper
Proc. SPIE. 6993, MEMS, MOEMS, and Micromachining III
KEYWORDS: Actuators, Mirrors, Multilayers, Electrodes, Silicon, Spatial light modulators, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

Proceedings Article | 23 January 2006 Paper
Proc. SPIE. 6114, MOEMS Display, Imaging, and Miniaturized Microsystems IV
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Metals, Silicon, Micromirrors, Semiconducting wafers, Adhesives, Wafer bonding

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Oxides, Mirrors, Electrodes, Polymers, Silicon, Micromirrors, Aluminum, Semiconducting wafers, Adhesives, Wafer bonding

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