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Benoit Poyet
at Lab National de Métrologie et d'Essais
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Publications (1)
Proceedings Article | 14 May 2010 Paper
Advances in the development of the LNE metrological atomic force microscope
Benoit Poyet, Sébastien Ducourtieux
Proceedings Volume 7718, 77180U (2010) https://doi.org/10.1117/12.854201
KEYWORDS: Metrology, Atomic force microscopy, Interferometers, Mirrors, Actuators, Head, Calibration, Atomic force microscope, Prototyping, Ferroelectric materials
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