Dr. Benoit Francois Claude Ramadout
at Globalfoundries
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 30 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Lithography, Optical lithography, Statistical analysis, Diffractive optical elements, Silicon, Diffusion, Manufacturing, Monte Carlo methods, Shape analysis, Design for manufacturability

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Diffractive optical elements, Metals, Silicon, Diffusion, Manufacturing, Resistance, Transistors, Failure analysis, Electrical breakdown, Design for manufacturability

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