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Berkcan Gökçe
R&D Engineer at imec
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Publications (1)
SPIE Journal Paper | 17 October 2016
Deep proton writing with 12 MeV protons for rapid prototyping of microstructures in polymethylmethacrylate
Evert Ebraert, Berkcan Gökçe, Sandra Van Vlierberghe, Michael Vervaeke, Pascal Meyer, Markus Guttmann, Peter Dubruel, Hugo Thienpont, Jürgen Van Erps
JM3, Vol. 15, Issue 04, 044501, (October 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.4.044501
KEYWORDS: Polymethylmethacrylate, Rapid manufacturing, Surface roughness, Prototyping, Photomasks, Nickel, Optical alignment, Single mode fibers, Connectors, Etching
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