Prof. Bernard D. Drevillon
Director of LPICM at Ecole Polytechnique
SPIE Involvement:
Author
Publications (24)


Proceedings Article | 12 April 2007 Paper
Proc. SPIE. 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics
KEYWORDS: Diffraction, Refractive index, Oscillators, Data modeling, Optical properties, Metals, Dielectrics, Electro optical modeling, Diffraction gratings, Absorption

Proceedings Article | 5 April 2007 Paper
Proc. SPIE. 6518, Metrology, Inspection, and Process Control for Microlithography XXI
KEYWORDS: Diffraction, Holograms, Metrology, Spectroscopy, Nickel, Polarimetry, Atomic force microscopy, Solids, Electroplating, Diffraction gratings

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Diffraction, Data modeling, Silica, Etching, Interfaces, Polarimetry, Atomic force microscopy, Photoresist materials, Statistical modeling, Diffraction gratings

Proceedings Article | 5 October 2005 Paper
Proc. SPIE. 5963, Advances in Optical Thin Films II
KEYWORDS: Gradient-index optics, Ellipsometry, Antireflective coatings, Glasses, Spectroscopy, Silicon, Process control, Antennas, Microwave radiation, Plasma

Showing 5 of 24 publications
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