In this contribution, we study the applicability of non-contact vibration analysis for flaw detection on the example of a ceramic electrolyte cup. These components are key parts in a prospective power cells design. First, extensive numerical modal analysis was performed using finite element modelling (FEM). Beside the complete mode spectrum of the freefloating perfect component, the influence of the suspension as well as deviations from the ideal geometry to the eigenmodes were studied. Additionally, the impact of different defect parameters, such as shape, location, and size, on the eigenmodes was investigated. For experimental investigation a soft suspension, impact excitation pendulum and near-surface microphone array rack were designed and built. Initially the samples with reference geometry and no defects have been measured. Eigenfrequencies, damping ratios and mode shapes have been extracted from the microphone array records using the operational modal analysis (OMA) algorithms, as the impact excitation signal was not traced. Experimental and numerical data have shown the good agreement. Further, the samples with reference defects, induced by laser cuts of different length and position, as well as laser drilled holes were studied. Depending on their type, size and position, the defects lead to a decrease of some eigenfrequencies and to a splitting of formerly degenerate modes. Same effects for a real crack are shown. Based on these results, preliminary application boundaries and potential development patterns for non-contact modal testing using a microphone array for defect detection are discussed.
In this article we describe a novel piezoresistive cantilever technology The described cantilever can be also applied in the
investigations of the thermal surface properties in all Scanning Thermal Microscopy (SThM) techniques. Batch
lithography/etch patterning process combined with focused ion beam (FIB) modification allows to manufacture thermally
active, resistive tips with a nanometer radius of curvature. This design makes the proposed nanoprobes especially
attractive for their application in the measurement of the thermal behavior of micro- and nanoelectronic devices.
Developed microcantilever is equipped with piezoresistive deflection sensor. The proposed architecture of the cantilever
probe enables easy its easy integration with micro- and nanomanipulators and scanning electron microscopes.In order to
approach very precisely the microcantilever near to the location to be characterized, it is mounted on a compact
nanomanipulator based on a novel mobile technology. This technology allows very stable positioning, with a nanometric
resolution over several centimeters which is for example useful for large samples investigations. Moreover, thanks to the
vacuum-compatibility, the experiments can be carried out inside scanning electron microscopes.
We demonstrate the construction of an acoustic long period ber grating (LPG) incorporating an index tailored few-mode ber and discuss its implementation for high resolution microscopy and spectroscopy. The LPG is used to selectively excite radially or azimuthally polarized second-higher order modes. Among many others, possible applications are nano-particle characterization and optical near- eld microscopy. The goal is to increase the feasibility and reliability of nondestructive optical evaluation for micro- and nanoscale devices and nanostructured materials.
The age-related changes in the visco-elastic properties of the human lens are discussed with respect to presbyopia for a
long time. All known measurement techniques are based on extracted lenses or are damaging the tissue. Hence, in vivo
studies of lens hardness are not possible at the moment. To close this gap in lens diagnostics this project deals with an
approach for a non-contact laser-acoustic characterization technique. Laser-generated wave fronts are reflected by the
tissue interfaces and are also affected by the visco-elastic properties of the lens tissue. After propagating through the eye,
these waves are recorded as corneal vibrations by laser vibrometry. A systematic analysis of amplitude and phase of
these signals and the wave generation process shall give information about the interface locations and the tissues viscoelastic
properties. Our recent studies on extracted porcine eyes proved that laser-acoustic sources can be systematically
used for non-contacting generation and recording of ultrasound inside the human eye. Furthermore, a specific numerical
model provides important contributions to the understanding of the complex wave propagation process. Measurements of the acoustic sources support this approach. Future investigations are scheduled to answer the question, whether this novel technique can be directly used during a laser surgery for monitoring purposes and if a purely diagnostic approach, e.g. by excitation in the aqueous humor, is also possible. In both cases, this technique offers a promising approach for non-contact ultrasound based eye diagnostics.
The need for custom-designed sensor networks, tailored to the specific SHM task for practical application of guided
waves, is constantly growing. As a prerequisite for a successful development of different monitoring concepts the
transducers wave excitation and receiving properties have to be known. The more exactly they are understood the more
reliable monitoring concepts are possible. Nowadays different piezoelectric transducer concepts, with varying acting
principles having their specific advantages, are used in SHM applications. Strongly unequal properties concerning source
density and directivity patterns are revealed. Hence, a method is introduced by which different transducer types can be compared in respect to their efficiency in exciting and receiving guided waves. Furthermore a reciprocity-based model for the estimation of the maximum transducer to transducer distance is applied and discussed.
The atomic force acoustic microscopy (AFAM) technique combines the principle of atomic force microscopy
(AFM) for nanoscale imaging with the ability to detect changes in elastic modulus on a tested sample. Depending on the
mode of operation, AFAM provides qualitative and quantitative information on the effective stiffness of the probed
sample either in the form of images or point measurements. AFAM is a contact based method and as such provides
information on the sample indentation modulus from a volume that is compressed under the AFM tip. The size of the
compressed volume depends on the static load applied to the tip, tip radius, and the elastic properties of the tip and the
probed sample and thus it can be controlled. The AFAM technique can be a powerful tool for characterization of thinfilm
systems and detection of defects that are buried at a depth of about 30 nm - 150 nm. We used the AFAM method to
study various nano-thin systems. A set of nine square membranes 3.7 μm x 3.7 μm large, with thickness increasing in 30
nm steps from 30 nm to 270 nm was dry etched in silicon. AFAM qualitative images obtained on the surface of this
sample showed all the membranes allowing for their localization. In addition, we used AFAM to determine indentation
modulus of silicon oxide films Mf with the thickness varying from 7 nm to 28 nm. The values obtained for Mf varied from 80 GPa to 90 GPa and were in good agreement with the literature values.
Advanced Scanning Probe Microscopy (SPM) modes such as Atomic Force Acoustic Microscopy (AFAM) and
Ultrasonic Force Microscopy (UFM) combine Atomic Force Microscopy (AFM) with an excitation of the sample or
cantilever by ultrasound. These techniques become increasingly powerful tools for the determination of material
properties on nanoscale.
Non-destructive evaluation of subsurface and buried structures is getting more and more important in semiconductor
industries and electronics system integration technology. Existing methods that allow subsurface measurements with
high local resolution are mostly based on destructive concepts as surface ablation by Focused Ion Beam (FIB) devices.
It is widely discussed in literature that AFAM and UFM techniques should have the capability to detect subsurface
features. But direct proofs of this capability are hard to find. The difficulty comes from the point that in UFM and
AFAM images besides elastic contrast also topological contrast is mixed in. So, for a direct proof samples are needed
which (a) show subsurface contrast and (b) having definitely no surface topology correlated with the subsurface feature
in question. These samples are not so easy to obtain. An appropriate sample fabrication technology was developed based
on the focussed ion beam technique. Using the machined samples the buried structure visibility for the AFAM technique
could be proved uniquely. The results are compared with conclusions from modelling.
We have formed nanoparticles of Si, C, Ti, and Fe by pulsed laser ablation and have explored the feasibility of passivating these particles during the synthesis process in order to minimize particle coarsening. Passivation was done by forming the nanoparticles in an Ar/N2 background, which allowed the formation of a thin nitride layer on the nanoparticle surface. In this paper we describe the synthesis procedure for synthesizing and passivating the nanoparticles. The characterization results indicate the nanoparticle synthesis in N2 does not significantly affect agglomeration.
Advanced Scanning Probe Microscopy techniques combine Atomic Force Microscopy (AFM) with ultrasound. Atomic
Force Acoustic Microscopy (AFAM) and Ultrasonic Force Microscopy (UFM) become increasingly powerful tools for
the determination of material properties on nanoscale. AFAM is mainly applied to the analysis of materials with elastic
properties locally varying on micro- and nanoscale. Deformation fields and buried structures can be visualized. In
AFAM, flexural and torsional cantilever vibrations are excited by out-of-plane and in-plane sample surface vibrations.
The ultrasound is transmitted from the sample into the cantilever while forces act between sensor tip and sample. The
sample surface is scanned by the sensor, and an ultrasonic image is acquired simultaneously to the topography image.
The contrast comprehended in the ultrasonic image depends on surface topography and on the local elastic and adhesive
properties of the sample. Voids, inclusions, or cracks, which build up regions of different elastic constants in the interior
of the material, are sensed by the local elastic response of the tip. As a consequence, information on hidden structures
can be derived from the acoustic images. Usually, this subsurface information is overlaid by additional topographic
information, also contained in the ultrasonic image. Here, an AFAM set up is combined with tensile and bending
modules. This approach allows generation of static deformation fields on surfaces and in-situ imaging and analysis of
these fields in the AFM or AFAM. A software module for micro deformation analysis by means of correlation based
algorithms (MicroDAC) is used to determine the local surface deformation quantitatively.
We studied nanoparticles by several high resolution microscopic methods as scanning electron microscopy (SEM), transmission electron microscopy (TEM) and scanning probe techniques especially atomic force microscopy (AFM) in contact and non-contact mode. While AFM in non-contact mode gives reliable information for 100 nm range
nanoparticles it fails for smaller particles, showing lack of reproducibility. TEM and SEM prove to be reliable. By SEM imaging the agglomeration behavior and the structure of agglomerates are discussed in detail.
Acoustic thermography is a relatively new NDE method based on thermographic detection of dissipated ultrasonic
energy. The system presented uses an uncooled high-speed camera and low power ultrasonic excitation. This technology
is characterized by low system costs, since no nitrogen or stirling cooling is necessary. Low power applications are
facilitated by efficient ultrasonic coupling, hence taking care of sensitive objects. A camera has been developed which
uses a 384 x 288 pixels micro-bolometer array as sensor and may record up to 100 frames per second.
The advantages of this system are demonstrated on a set of carbon fiber reinforced plastic (CFRP) plates damaged by
impacts of various strengths. The impact flaws consisting of fiber fractures and delaminations can be detected while
transmitting low ultrasonic energy of only about 1.3 W to the specimen.
A numerical model of an acoustic microscope based on the elastodynamic finite integration technique (EFIT) is presented. It allows time-domain simulations of elastic wave propagation in both, fluids and solids, and includes focusing of the incident wave field as well as scattering at defects and the fluid-solid interface taking mode converted echoes and leaky Rayleigh waves into account. The simulations can be performed for different frequencies and materials and can be used for the continuous and time-resolved mode as well as for transmission and reflection microscopy. The simulation results can be represented by time-domain signals and wave front snapshots. The formation of V(r,z) curves is also possible. In the present paper the simulations are applied to the problem of vertical cracks and spherical inclusions in a solid substrate as well as for subsurface characterization of thin coatings.
Several work performed at the Fraunhofer Institute IZFP Dresden on photo and particle acoustic methods is presented. It includes both, modeling activities by an explicit numerical method (CEFIT) and experimental work. The given examples of applied excitations are photons (Laser acoustics) and electrons (Scanning Electron Acoustic Microscopy, SEAM). Both, time resolved measurements by pulse excitation as well as monofrequent measurements by periodic excitation together with signal recovery (lock-in technique) are discussed.
During the design of ever smaller sized micro-systems, the question appears how much the properties of the materials used differ from those of bulk material and even to laterally extended thin films. The aim of this paper is to analyze mechanical behavior of micro-structured metallic systems like Cu- and Al- interconnections in microelectronic devices or metallic components in micro-opto-electro-mechanical systems (MOEMS). Using atomic force microscopy (AFM) several features like roughness, grain size and dimension accuracy of the materials could be measured for the initial state and in-situ during thermo-mechanical load. For that purpose, meander like line structures produced in CMOS technology as well as special structures fabricated by laterally resolved ion beam sputtering by a focused ion beam equipment (FIB) were used for bending tests. Additionally the elastic and plastic deformation of the lines can be assessed nondestructively by the change of the line resistance measured with high precision. The analysis of the experimental results reveals abnormal plastic-elastic mechanical properties of metallic systems of micro- and sub-micrometer dimension. Practical consequences are discussed concerning the reliability of metallic interconnects, the quality of micro-mirror materials as well as a new approach of micro-material tailoring by surface treatment.
NDE activities at the Laboratory for Acoustic Diagnosis and Quality Assurance (EADQ) Dresden are outlined. The applied methods comprise acoustic, thermal, optical and X-ray ones. Additionally, scanning probe methods (SPM) and scanning electron microscopy (SEM) are used. Combinations of different methods are especially effective. This is demonstrated for the coupling of an acoustic approach with SEM. For NDE on a micro- and nano-meter scale, preparation of appropriate test flaws and the verification of the NDE results turn out to be a challenge. To meet this challenge, we propose an approach based on focused ion beam technique.
A large number of microgrippers has been developed in industry and academia. Although the importance of hybrid integration techniques and hence the demand for assembly tools grows continuously a large part of these developments has not yet been used in industrial production. The first grippers developed for microassembly were basically vacuum grippers and downscaled tweezers. Due to increasingly complex assembly tasks more and more functionality such as sensing or additional functions such as adhesive dispensing has been integrated into gripper systems over the last years. Most of these gripper systems are incompatible since there exists no standard interface to the assembly machine and no standard for the internal modules and interfaces. Thus these tools are not easily interchangeable between assembly machines and not easily adaptable to assembly tasks. In order to alleviate this situation a construction kit for modular microgrippers is being developed. It is composed of modules with well defined interfaces that can be combined to build task specific grippers. An abstract model of a microgripper is proposed as a tool to structure the development of the construction kit. The modular concept is illustrated with prototypes.
Hot embossing is an inexpensive method for the reproduction of microstructures. It has matured during the last few years from a pure laboratory method to an industrially applicable process. As an example, the technology for the production of movable metallic microstructures by aligned to embossing and reactive ion etching is presented, which has been developed at the Forschungszentrum Karlsruhe/IMT.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.