Prof. Bernd Michel
Departmental Head at Fraunhofer-Institut für Elektronische Nanosysteme
SPIE Involvement:
Author
Publications (32)

Proceedings Article | 30 April 2007 Paper
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Microelectromechanical systems, Nanotechnology, Mechanics, Reliability, Atomic force microscopy, Scanning electron microscopy, Ion beams, Digital image correlation, Scanning probe microscopy, Photomicroscopy

Proceedings Article | 11 April 2007 Paper
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Microelectromechanical systems, Packaging, Thin films, Ions, Silicon, Manufacturing, Silicon films, Digital image correlation, Low pressure chemical vapor deposition, Chemical elements

Proceedings Article | 28 April 2006 Paper
Proc. SPIE. 6188, Optical Micro- and Nanometrology in Microsystems Technology
KEYWORDS: Microelectromechanical systems, Semiconductors, Microsystems, Sensors, Ions, Silicon, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

Proceedings Article | 4 April 2006 Paper
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Microsystems, Sensors, Ions, Silicon, Manufacturing, Ion beams, Digital image correlation, Micromachining, Photomicroscopy

Proceedings Article | 4 April 2006 Paper
Proc. SPIE. 6175, Testing, Reliability, and Application of Micro- and Nano-Material Systems IV
KEYWORDS: Microelectromechanical systems, Polymers, Interfaces, Reliability, Atomic force microscopy, Finite element methods, Microelectronics, Digital image correlation, Scanning probe microscopy, Chemical elements

Showing 5 of 32 publications
Proceedings Volume Editor (7)

Showing 5 of 7 publications
Conference Committee Involvement (29)
Smart Structures and NDE for Industry 4.0, Smart Cities, and Energy Systems
27 April 2020 | Online Only, California, United States
Smart Structures and NDE for Energy Systems and Industry 4.0
4 March 2019 | Denver, Colorado, United States
Smart Materials and Nondestructive Evaluation for Energy Systems IV
5 March 2018 | Denver, Colorado, United States
Smart Materials and Nondestructive Evaluation for Energy Systems III
27 March 2017 | Portland, Oregon, United States
Smart Materials and Nondestructive Evaluation for Energy Systems
9 March 2015 | San Diego, California, United States
Showing 5 of 29 Conference Committees
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