This course provides attendees with a basic working knowledge of nanotribology and nanomechanics and applications of MEMS/NEMS and BioMEMS/NEMS. The course concentrates on the recent research carried out using atomic force microscopy. Topics include: Principles of Nanotribology and Nanomechanics: Tribology including an overview of surface roughness, friction, interface temperatures, wear, and lubrication; micro/nanotribology and material characterization studies using atomic/friction force microscopy including an overview of friction, lubrication, scratching, wear and indentation/localized deformation; Nanoindentation techniques including description of the instrument, experimental methodology and examples of data. Adhesion and Stiction: mechanisms of solid-solid adhesion; mechanisms of liquid mediated contact; adhesion measurement techniques; lubrication approaches and typical stiction data; examples of methods to reduce adhesion and stiction in magnetic storage devices and MEMS/NEMS Applications to MEMS/NEMS and BioMEMS/NEMS: current status of micro/nanodevices in the market place; tribological issues in MEMS/NEMS and BioMEMS/NEMS and BioMEMS/NEMS; importance of mechanics of nanostructures; micro/nanotribological studies of MEMS materials and lubricants for MEMS/NEMS and BioMEMS/NEMS; component level studies; mechanics of nanostructures; Biomimetics including superhydrophobicity and Gecko adhesion; directions and the future of MEMS and nanodevices.