New applications for ultra-violet imaging are emerging in the fields of drug discovery and industrial inspection. High throughput is critical for these applications where millions of drug combinations are analyzed in secondary screenings or high rate inspection of small feature sizes over large areas is required. Sarnoff demonstrated in1990 a back illuminated, 1024 X 1024, 18 um pixel, split-frame-transfer device running at > 150 frames per second with high sensitivity in the visible spectrum. Sarnoff designed, fabricated and delivered cameras based on these CCDs and is now extending this technology to devices with higher pixel counts and higher frame rates through CCD architectural enhancements. The high sensitivities obtained in the visible spectrum are being pushed into the deep UV to support these new medical and industrial inspection applications. Sarnoff has achieved measured quantum efficiencies > 55% at 193 nm, rising to 65% at 300 nm, and remaining almost constant out to 750 nm. Optimization of the sensitivity is being pursued to tailor the quantum efficiency for particular wavelengths. Characteristics of these high frame rate CCDs and cameras will be described and results will be presented demonstrating high UV sensitivity down to 150 nm.
A family of backside illuminated CCD imagers with 6.6 micrometers pixels has been developed. The imagers feature full 12 bit (> 4,000:1) dynamic range with measured noise floor of < 10 e RMS at 5 MHz clock rates, and measured full well capacity of > 50,000 e. The modulation transfer function performance is excellent, with measured MTF at Nyquist of 46% for 500 nm illumination. Three device types have been developed. The first device is a 1 K X 1 K full frame device with a single output port, which can be run as a 1 K X 512 frame transfer device. The second device is a 512 X 512 frame transfer device with a single output port. The third device is a 512 X 512 split frame transfer device with four output ports. All feature the high quantum efficiency afforded by backside illumination.