In this paper, wireless optical system was developed by using array type TbDyFeNi thin film actuator. The effect of Ni
content on the magneto-mechanical properties of the Tb0.24Dy0.76Fe2 system, for wireless micro actuator with the effect of
deposited film thickness of TbDyFeNi on silicon substrate, was also investigated. To create the device, array shape
silicon substrates were bulk micromachined, and Tb0.24Dy0.76Fe2-xNix, (x=0, 0.5, 1.2, 2.0) films were sputter-deposited on
the back side of substrate by selective DC magnetron sputtering techniques. After the sputter process, magnetization and
effective mgnetoelastic coupling coefficient and magnetostriction of the sample were measured for the magnetomechanical
characterizaztion. For the operation, each branch of the array type actuator has different length and out-ofplane
motion. Each branch was actuated by externally applied magnetic fields up to 0.5T and motion of the branches
made inclined movement. As a result, deflected angle of the actuator due to the movement of array type actuator to
external magnetic fields were observed.
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