Boren Luo
at Taiwan Semiconductor Manufacturing Co Ltd
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2008 Paper
Proc. SPIE. 6924, Optical Microlithography XXI
KEYWORDS: Diffraction, Data modeling, Polarization, Signal attenuation, Pellicles, Projection systems, Photomasks, Immersion lithography, Optical proximity correction, Critical dimension metrology

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