Dr. Boris Kobrin
CEO at Innovasonic Inc
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 7 March 2014 Paper
Proceedings Volume 8974, 89740V (2014) https://doi.org/10.1117/12.2037415
KEYWORDS: Photomasks, Lithography, Antireflective coatings, Nanostructures, Reflectivity, Glasses, Cones, Optical lithography, Ultraviolet radiation, Refraction

Proceedings Article | 8 February 2012 Paper
Proceedings Volume 8249, 82490O (2012) https://doi.org/10.1117/12.910158
KEYWORDS: Photomasks, Nanolithography, Lithography, Nanostructures, Nanostructuring, Printing, Optical lithography, Near field, Ultraviolet radiation, Glasses

Proceedings Article | 23 March 2006 Paper
Tong Zhang, Boris Kobrin, Mike Wanebo, Romek Nowak, Richard Yi, Jeff Chinn, Markus Bender, Andreas Fuchs, Martin Otto
Proceedings Volume 6151, 615117 (2006) https://doi.org/10.1117/12.654658
KEYWORDS: Nanoimprint lithography, Liquids, Lithography, Coating, Deposition processes, Silicon, Self-assembled monolayers, Photoresist processing, Process control, Plasma

Proceedings Article | 22 January 2005 Paper
Proceedings Volume 5716, (2005) https://doi.org/10.1117/12.592627
KEYWORDS: Self-assembled monolayers, Silicon, Glasses, Liquids, Microelectromechanical systems, Reliability, Optical coatings, Plastic coatings, Polymers, Manufacturing

Proceedings Article | 30 December 2003 Paper
Robert Ashurst, Carlo Carraro, Jeff Chinn, Victor Fuentes, Boris Kobrin, Roya Maboudian, Romuald Nowak, Richard Yi
Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.531798
KEYWORDS: Coating, Microelectromechanical systems, Deposition processes, Semiconducting wafers, Plasma treatment, Plasma, Liquids, Self-assembled monolayers, Process control, Reliability

Showing 5 of 8 publications
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