Brent E. Boerger
Project Manager
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 21 June 2006 Paper
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Signal to noise ratio, Lithography, Microscopes, Image processing, Interfaces, Inspection, Image resolution, Scanning electron microscopy, Design for manufacturing, Computer aided design

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6152, Metrology, Inspection, and Process Control for Microlithography XX
KEYWORDS: Human-machine interfaces, Lithography, Sensors, Image processing, X-rays, Inspection, Control systems, Scanning electron microscopy, Photomasks, Computer aided design

Proceedings Article | 24 March 2006 Paper
Proc. SPIE. 6151, Emerging Lithographic Technologies X
KEYWORDS: Mathematical modeling, Lithography, Microfluidics, Mechanics, X-rays, Silicon, Photomasks, Helium, Silicon carbide, Semiconducting wafers

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Lithography, X-ray optics, X-rays, Amplifiers, Collimators, Collimation, Photomasks, Semiconducting wafers, X-ray lithography, Plasma

Proceedings Article | 20 May 2004 Paper
Proc. SPIE. 5374, Emerging Lithographic Technologies VIII
KEYWORDS: Etching, Image processing, X-rays, Silicon, Chromium, 3D modeling, Photomasks, Silicon carbide, Semiconducting wafers, X-ray lithography

Showing 5 of 7 publications
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