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Brian C. Morgan
at Univ of Maryland College Park
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 1 July 2005 Paper
Design and simulation of comb-drive actuators incorporating gray-scale technology for tailored actuation characteristics
Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608529
KEYWORDS: Actuators, Capacitance, Microelectromechanical systems, Photoresist materials, Finite element methods, Silicon, Photomasks, Deep reactive ion etching, Etching, Device simulation
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