CONFERENCE PROCEEDINGS
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Britain J. Smith
Senior Process Engineer at Intel Corp
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Publications (3)
Proceedings Article | 21 November 2023 Presentation + Paper
Die-to-database inspections of optical patterned masks
Christopher Wieland, Kristy Kormondy, Annelise Beck, Britain Smith, Firoz Ghadiali, Jun Kim, Frank Abboud, Tetsuya Sendoda, Naonari Kondo, Tomohiro Imahoko, Jeoung Kim, Chikato Kaga, Arosha Goonesekera, Wonil Cho, Sankaranarayanan Paninjath, Saikiran Madhusudhan, Prakash Deep, Shivam Nln, Sasidhara Reddy, Ranganadh Peesapati
Proceedings Volume 12751, 1275105 (2023) https://doi.org/10.1117/12.2688267
KEYWORDS: Inspection, Defect inspection, Photomasks, Optical inspection, Semiconducting wafers, Printing, Image processing, Detection and tracking algorithms, Defect detection
Proceedings Article | 16 June 2003 Paper
Employing Step and Flash imprint lithography for gate-level patterning of a MOSFET device
Britain Smith, Nicholas Stacey, J. Donnelly, David Onsongo, Todd Bailey, Chris Mackay, Douglas Resnick, William Dauksher, David Mancini, Kevin Nordquist, S. Sreenivasan, Sanjay Banerjee, John Ekerdt, Grant Willson
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.490142
KEYWORDS: Etching, Lithography, Field effect transistors, Optical alignment, Semiconducting wafers, Optical lithography, Photomasks, Oxides, Reactive ion etching, Halogens
Proceedings Article | 16 June 2003 Paper
Advances in Step and Flash imprint lithography
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.484985
KEYWORDS: Etching, Oxygen, Lithography, Polymerization, Silicon, Data modeling, Semiconducting wafers, Statistical analysis, Inspection, Materials processing
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