Mr. Bruce A. Auches Profile

Bruce A. Auches

Director, Advanced Manufacturing

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Publications (2)

Proceedings Article | 5 November 2005 Paper

Production performance of a Sigma7300 DUV mask writer

Bob Olshausen, Mahesh Chandramouli, Dustin Wall, Bruce Auches, Damon Cole

Proceedings Volume 5992, 59920V (2005) https://doi.org/10.1117/12.633167

KEYWORDS: Spatial light modulators, Binary data, Deep ultraviolet, Neodymium, Electron beam lithography, Calibration, Data conversion, Overlay metrology, Critical dimension metrology, Photoresist processing

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Proceedings Article | 28 June 2005 Paper

Second level exposure for phase shift mask applications using an SLM-based DUV mask writer

Mahesh Chandramouli, Bob Olshausen, Yulia Korobko, Sven Henrichs, Ping Qu, Jian Ma, Bruce Auches, Damon Cole, Thomas Ostrom, Angela Beyerl, Robert Eklund, Raoul Zerne, Peter Goransson, Magnus Persson, Tom Newman

Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617359

KEYWORDS: Neodymium, Photomasks, Spatial light modulators, Deep ultraviolet, Electron beam lithography, Optical alignment, Quartz, Optical lithography, Chromium, Critical dimension metrology

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