Mr. Byungchul Shin Profile

Byungchul Shin

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Publications (2)

Proceedings Article | 23 March 2020 Presentation + Paper

Jaehwan Kim, Jin Kim, Byungchul Shin, Sangah Lee, Jae-Hyun Kang, Joong-Won Jeon, Piyush Pathak, Jac Condella, Frank Gennari, Philippe Hurat, Ya-Chieh Lai

Proc. SPIE. 11328, Design-Process-Technology Co-optimization for Manufacturability XIV

KEYWORDS: Metals, Silicon, Manufacturing, Reliability, Design for manufacturing, Extreme ultraviolet lithography, Optical proximity correction, Semiconducting wafers, Yield improvement, Chemical mechanical planarization

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Proceedings Article | 4 April 2019 Presentation + Paper

A novel design-for-yield solution based on interconnect level layout improvements at 7nm technology node

Jaehwan Kim, Sangah Lee, Byungchul Shin, J. Jeon, Jin Kim, B. M. Kim, Jae-Hyun Kang, Seungweon Paek, Piyush Pathak, Frank Gennari, Philippe Hurat, Ya-Chieh Lai

Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII

KEYWORDS: Lithography, Optical lithography, Metals, Manufacturing, Extreme ultraviolet, CMOS technology, Extreme ultraviolet lithography, Double patterning technology, Computer aided design, Resolution enhancement technologies

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