Mr. Byungug Cho Profile

Byungug Cho

at SK Hynix Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 7 March 2008 Paper

Evaluation of inverse lithography technology for 55nm-node memory device

Byung-ug Cho, Sung-woo Ko, Jae-seung Choi, Cheol-Kyun Kim, Hyun-jo Yang, DongGyu Yim, David Kim, Bob Gleason, KiHo Baik, Ying Cui, Thuc Dam, Linyong Pang

Proceedings Volume 6924, 692438 (2008) https://doi.org/10.1117/12.772515

KEYWORDS: Photomasks, Optical proximity correction, Lithography, Manufacturing, SRAF, Scanners, Atrial fibrillation, Calibration, Optimization (mathematics), Distance measurement

Read Abstract +

Proceedings Article | 21 March 2007 Paper

Highly accurate model-based verification using SEM image calibration method

Byung-ug Cho, Dae-jin Park, Dong-suk Chang, Jae-seung Choi, Cheol-Kyun Kim, DongGyu Yim, Ju-Byung Kim

Proceedings Volume 6521, 65210R (2007) https://doi.org/10.1117/12.712037

KEYWORDS: Scanning electron microscopy, Calibration, Optical proximity correction, Data modeling, Model-based design, Semiconducting wafers, Image processing, Bridges, Manufacturing, Optical lithography

Read Abstract +

Proceedings Article | 10 May 2005 Paper

OPC accuracy enhancement through systematic OPC calibration and verification methodology for sub-100nm node

Hyunjo Yang, Jaeseung Choi, Byungug Cho, Byeongho Cho, Donggyu Yim, Jinwoong Kim

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599728

KEYWORDS: Optical proximity correction, Computer aided design, Calibration, Solid modeling, Scanning electron microscopy, Data modeling, Resolution enhancement technologies, Cadmium, Image processing, Tolerancing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years