Dr. C. Gabriel Morgan
Applications Scientist and Sales Representative
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 3 April 2012 Paper
C. Morgan, R. Vane
Proceedings Volume 8324, 83242F (2012) https://doi.org/10.1117/12.917786
KEYWORDS: Plasma, Contamination, Carbon, Electrodes, Extreme ultraviolet, Prototyping, Scanning electron microscopy, Sensors, EUV optics, Oxygen

Proceedings Article | 23 March 2010 Paper
Christopher Morgan, Patrick Naulleau, Senajith Rekawa, Paul Denham, Brian Hoef, Michael Jones, Ronald Vane
Proceedings Volume 7636, 76361Q (2010) https://doi.org/10.1117/12.846386
KEYWORDS: Plasma, Oxygen, Contamination, Mirrors, EUV optics, Extreme ultraviolet, Reflectivity, Carbon, Oxides, Extreme ultraviolet lithography

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