Ms. C. W. Yeh Profile

C. W. Yeh

at Macronix International Co Ltd

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Author

Publications (2)

Proceedings Article | 3 April 2012 Paper

Overlay target design and evaluation for SADP process

C. Yeh, Chao-Tien Huang, Kengchi Lin, C. Huang, Elvis Yang, T. Yang, K. Chen, Chih-Yuan Lu

Proceedings Volume 8324, 832431 (2012) https://doi.org/10.1117/12.914439

KEYWORDS: Image segmentation, Overlay metrology, Photomasks, Etching, Image processing, Semiconducting wafers, Scatterometry, Scanning electron microscopy, Lithography, Coating

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Proceedings Article | 1 April 2009 Paper

Contact formation with extremely low proximity effect by double patterning technology

C. W. Yeh, S. S. Yu, H. J. Lee, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen, Chih-Yuan Lu

Proceedings Volume 7273, 72731E (2009) https://doi.org/10.1117/12.812466

KEYWORDS: Etching, Lithography, Photomasks, Double patterning technology, Optical lithography, Dielectrics, Image processing, Photoresist materials, Semiconducting wafers, Immersion lithography

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