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Dr. Carl B. Freidhoff
Deacon
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Publications (1)
Proceedings Article | 14 July 1995 Paper
Development of plasma-enhanced CVD for multilayer mirror coatings
Carl Freidhoff, Harry Buhay, William Partlow, Donald Decker, Karl Klemm
Proceedings Volume 2428, (1995) https://doi.org/10.1117/12.213717
KEYWORDS: Plasma enhanced chemical vapor deposition, Multilayers, Mirrors, Optical coatings, Absorption, Thin film coatings, Reflectivity, Deposition processes, Thin films, Silicon
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