Dr. Carles Cané
Research Professor at Ctr Nacional de Microelectrónica
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 5 May 2011 Paper
Proc. SPIE. 8066, Smart Sensors, Actuators, and MEMS V
KEYWORDS: Infrared detectors, Thermography, Modulation, Spectroscopy, Silicon, Resistance, Infrared spectroscopy, Infrared radiation, Aluminum, Temperature metrology

Proceedings Article | 19 May 2009 Paper
Proc. SPIE. 7362, Smart Sensors, Actuators, and MEMS IV
KEYWORDS: Microelectromechanical systems, Oxides, Electrodes, Annealing, X-ray diffraction, Silicon, Solids, Pulsed laser deposition, Semiconducting wafers, Zirconium dioxide

Proceedings Article | 30 December 2008 Paper
Proc. SPIE. 7268, Smart Structures, Devices, and Systems IV
KEYWORDS: Fabrication, Gas sensors, Optical lithography, Sensors, Silicon, Aluminum, Deep reactive ion etching, Palladium, Semiconducting wafers, Wafer bonding

Proceedings Article | 17 May 2007 Paper
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Gas sensors, Sensors, Glasses, Silicon, Gases, Chromium, Deep reactive ion etching, Palladium, System integration, Semiconducting wafers

Proceedings Article | 15 May 2007 Paper
Proc. SPIE. 6589, Smart Sensors, Actuators, and MEMS III
KEYWORDS: Optical lithography, Electrodes, Capillaries, Electrons, Silicon, Hydrogen, Deep reactive ion etching, Microfabrication, Semiconducting wafers, Liquids

Showing 5 of 14 publications
Proceedings Volume Editor (4)

SPIE Conference Volume | 18 May 2009

SPIE Conference Volume | 9 May 2007

SPIE Conference Volume | 1 July 2005

SPIE Conference Volume | 24 April 2003

Conference Committee Involvement (12)
SPIE Microtechnologies
8 May 2017 | Barcelona, Spain
SPIE Microtechnologies
4 May 2015 | Barcelona, Spain
Smart Sensors, Actuators, and MEMS VI
24 April 2013 | Grenoble, France
Smart Sensors, Actuators and MEMS
18 April 2011 | Prague, Czech Republic
Smart Sensors, Actuators and MEMS
4 May 2009 | Dresden, Germany
Showing 5 of 12 Conference Committees
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