Prof. Carlos H. Mastrangelo
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 January 2005 Paper
Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.600087
KEYWORDS: Actuators, Mirrors, Electrodes, Micromirrors, Microactuators, Capacitors, Capacitance, Telecommunications, Silicon, Multilayers

Proceedings Article | 22 January 2005 Paper
Proceedings Volume 5719, (2005) https://doi.org/10.1117/12.600083
KEYWORDS: Switching, Micromirrors, Mirrors, Microelectromechanical systems, Control systems, Switches, Electrodes, Device simulation, Error analysis, Actuators

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top