Dr. C. Grant Willson
at Univ of Texas at Austin
SPIE Involvement:
Author | Instructor
Publications (157)

Proceedings Article | 25 March 2019 Presentation + Paper
Proceedings Volume 10960, 109600Y (2019) https://doi.org/10.1117/12.2515176
KEYWORDS: Optical lithography, Silicon

Proceedings Article | 25 March 2019 Presentation
Ji Yeon Kim, Natsuko Ito, XiaoMin Yang, Stephen Sirard, Austin Lane, Gregory Blachut, Yusuke Asano, Christopher Ellison, Nathaniel Lynd, C. Grant Willson
Proceedings Volume 10960, 109600S (2019) https://doi.org/10.1117/12.2514793
KEYWORDS: Directed self assembly, Chromium, Chemistry, Polymers, Photomasks, High volume manufacturing, Manufacturing, Nanoimprint lithography, Lithography, Photoresist processing

Proceedings Article | 25 March 2019 Presentation
Proceedings Volume 10960, 109600J (2019) https://doi.org/10.1117/12.2514762
KEYWORDS: Optical lithography, Photoresist materials, Polymers, Photoresist developing, Image resolution, Astatine

Proceedings Article | 22 March 2018 Paper
Gregory Blachut, Stephen Sirard, Andrew Liang, Chris Mack, Michael Maher, Paulina Rincon-Delgadillo, Boon Teik Chan, Geert Mannaert, Geert Vandenberghe, C. Grant Willson, Christopher Ellison, Diane Hymes
Proceedings Volume 10589, 1058907 (2018) https://doi.org/10.1117/12.2297489
KEYWORDS: Etching, Silicon, Chemistry, Reactive ion etching, Directed self assembly, Semiconducting wafers, Dry etching, Scanning electron microscopy, Line edge roughness

Proceedings Article | 19 March 2018 Presentation
Natsuko Ito, Gregory Blachut, Yusuke Asano, Christopher Ellison, Grant Willson, Stephen Sirard, XiaoMin Yang, Austin Lane
Proceedings Volume 10584, 105840J (2018) https://doi.org/10.1117/12.2297030
KEYWORDS: Directed self assembly, Lithography, Silicon, Polymerization, Silicon films, Reactive ion etching, Thin films, Photomasks, Thin film coatings, Chemistry