Carsten Hartig
Principal Member Technical Staff at GLOBALFOUNDRIES Dresden Module One GmbH & Co KG
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Author
Publications (19)

Proceedings Article | 22 February 2021 Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Internet, Reticles, Metrology, Data modeling, Manufacturing, Time metrology, Bridges, Semiconducting wafers, Data integration, Design for manufacturability

Proceedings Article | 22 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Metrology, Data modeling, Etching, Manufacturing, Data processing, Process control, Machine learning, Semiconducting wafers, Optics manufacturing

Proceedings Article | 13 March 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Diffraction, Data modeling, Manufacturing, Computer simulations, Scatterometry, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Diffraction gratings

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Optical lithography, Metals, Computer simulations, Feature extraction, Distance measurement, Critical dimension metrology, Semiconducting wafers, Overlay metrology, Electrical breakdown

Proceedings Article | 28 March 2017 Presentation + Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Diffractive optical elements, Data modeling, Optical properties, Etching, Metals, Dielectrics, Photomasks, Semiconducting wafers, Optics manufacturing, Tin

Showing 5 of 19 publications
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