Dr. Cecilia Dupre
at CEA-LETI
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 April 2020 Presentation
Proc. SPIE. 11364, Integrated Photonics Platforms: Fundamental Research, Manufacturing and Applications
KEYWORDS: Transceivers, Optical lithography, Laser applications, Resistance, Silicon photonics, Data communications, Semiconducting wafers, Molecular beam epitaxy, Wafer bonding, Back end of line

Proceedings Article | 26 February 2020 Paper
Proc. SPIE. 11284, Smart Photonic and Optoelectronic Integrated Circuits XXII
KEYWORDS: Metamaterials, Lithography, Optical design, Deep ultraviolet, Waveguides, Interfaces, Silicon, Fiber couplers, Nanophotonics, Diffraction gratings

Proceedings Article | 3 April 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Semiconductors, FT-IR spectroscopy, Optical lithography, Silicon, Process control, Line width roughness, Plasma etching, Chemical analysis, Photoresist processing, Plasma

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