Mr. Cedric Breluzeau Profile

Cedric Breluzeau

at Univ Paris-Sud II

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Author

Publications (3)

Proceedings Article | 21 June 2006 Paper

In-plane vibration measurement of microdevices by the knife-edge technique in reflection mode

Alain Bosseboeuf, Cedric Bréluzeau, Fabien Parrain, Philippe Coste, Jean-Paul Gilles, Souhil Megherbi, Xavier Le Roux

Proceedings Volume 6345, 63451D (2006) https://doi.org/10.1117/12.693067

KEYWORDS: Modulation, Vibrometry, Reflection, Resonators, Microresonators, Calibration, Microelectromechanical systems, Silicon, Phase measurement, Motion measurement

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Proceedings Article | 29 August 2005 Paper

Automated fringe-pattern extrapolation for patterned surface profiling by interference microscopy with Fourier transform analysis

Cedric Breluzeau, Alain Bosseboeuf, Sylvain Petitgrand, Xavier Leroux

Proceedings Volume 5858, 58580B (2005) https://doi.org/10.1117/12.612270

KEYWORDS: Demodulation, Fourier transforms, Fringe analysis, Microscopy, Modulation, Anisotropic filtering, Binary data, Interferometry, Phase shift keying, Optical filters

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Proceedings Article | 13 June 2005 Paper

Assessment of technology and (thermo)mechanical behaviour of MEMS devices by interference microscopy

Alain Bosseboeuf, Cedric Breluzeau, Sylvain Petitgrand

Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.621584

KEYWORDS: Microscopy, Microelectromechanical systems, Interferometry, Objectives, Silicon, Light sources, Etching, Microscopes, 3D metrology, Phase measurement

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