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Changmin Lee
at Yonsei Univ
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 20 August 2020 Presentation
Pattern quality analysis in a digital lithography system using scanning point array method
Proceedings Volume 11484, 114840J (2020) https://doi.org/10.1117/12.2567399
KEYWORDS: Lithography, Electron beam lithography, Photomasks, Digital micromirror devices, Optical lithography, Semiconducting wafers, Zone plates, Mirrors
Proceedings Article | 19 August 2020 Presentation
Characterization of position and two-dimensional profiles of high-density beam spot array for digital lithography system
Proceedings Volume 11509, 115090H (2020) https://doi.org/10.1117/12.2567574
KEYWORDS: Lithography, Digital micromirror devices, Inspection, Charge-coupled devices, Optical lithography, Photomasks, Beam shaping, Optical testing, Optical filtering, Lenses
Proceedings Article | 17 November 2016 Paper
Improvement of photomask CD uniformity using spatially resolved optical emission spectroscopy
Proceedings Volume 9985, 99851S (2016) https://doi.org/10.1117/12.2242406
KEYWORDS: Photomasks, Etching, Plasma, Chromium, Argon, Dry etching, Chlorine, Emission spectroscopy, Critical dimension metrology, Plasma etching
Proceedings Article | 3 November 2016 Presentation
Minimum energy of silver and copper nanoparticles for laser sintering (Conference Presentation)
Proceedings Volume 9927, 99270S (2016) https://doi.org/10.1117/12.2236804
KEYWORDS: Laser sintering, Silver, Copper, Particles, Nanoparticles, Optical lithography, Analytical research, Electronics, Metals, Manufacturing
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