Dr. Changmook Yim
at SAMSUNG Electronics Co., Ltd.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 124990C (2023) https://doi.org/10.1117/12.2657880
KEYWORDS: Etching, Data modeling, Modeling, Machine learning, Design and modelling, Statistical modeling, Optical proximity correction, Reflection, Feature extraction, Artificial intelligence

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