Dr. Charles Tarrio
Physicist at National Institute of Standards and Technology
SPIE Involvement:
Author
Publications (39)

Proceedings Article | 9 September 2019 Paper
Proc. SPIE. 11118, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXI
KEYWORDS: Aluminum, Optical filters, Transmittance, Oxidation, Signal attenuation, X-rays, Ultraviolet radiation, Infrared radiation

Proceedings Article | 16 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Multilayers, Reflectivity, Extreme ultraviolet lithography, Extreme ultraviolet, Annealing, Resistance, Oxides, Reflectometry, Silicon, Oxidation

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Semiconducting wafers, Contamination, Picosecond phenomena, Temperature metrology, Extreme ultraviolet, Molecules, Extreme ultraviolet lithography, Electron beams, Standards development, Lithography

Proceedings Article | 17 April 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Sensors, Extreme ultraviolet, Reflectometry, Polarization, Radiation effects, Reflectivity, Motion models, EUV optics, 3D modeling, Data modeling

Proceedings Article | 18 March 2014 Paper
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Extreme ultraviolet, Reflectivity, Infrared radiation, Extreme ultraviolet lithography, Plasma, Infrared technology, Neodymium, Nickel, Surface finishing, Diffraction gratings

Showing 5 of 39 publications
Conference Committee Involvement (1)
Optical Constants of Materials for UV to X-Ray Wavelengths
4 August 2004 | Denver, Colorado, United States
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