Mr. Chen-Yu Liu Profile

Chen-Yu Liu

at Taiwan Semiconductor Manufacturing Co Ltd

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Publications (2)

Proceedings Article | 27 March 2014 Paper

Effective resist profile control

Chen-Yu Liu, Chien-Wei Wang, Chun-Ching Huang, Ching-Yu Chang, Yao-Ching Ku

Proceedings Volume 9051, 90511Y (2014) https://doi.org/10.1117/12.2047144

KEYWORDS: Lithography, Photomasks, Polymers, Semiconducting wafers, Finite element methods, Photoresist processing, Defect inspection, Quantitative analysis, Organic materials, Silicon

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Proceedings Article | 16 April 2011 Paper

A study of conductive material for e-beam lithography

Wen-Yun Wang, Chen-Yu Liu, Tsung-Chih Chien, Chun-Ching Huang, Shy-Jay Lin, Ya-Hui Chang, Jack J.H. Chen, Ching-Yu Chang, Yao-Ching Ku, Burn J. Lin

Proceedings Volume 7972, 797228 (2011) https://doi.org/10.1117/12.879575

KEYWORDS: Electrons, Metals, Polymers, Scanning electron microscopy, Electron beam lithography, Monte Carlo methods, Polymer thin films, Critical dimension metrology, Resistance, Photomasks

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