Dr. Chen Chao Profile

Dr. Chen Chao

at The Hong Kong Polytechnic Univ

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 3 May 2007 Paper

Chen Chao, Tin-Yan Lam, Kin-Wing Kwok, Helen Lai-wa Chan

Proceedings Volume 6556, 65561J (2007) https://doi.org/10.1117/12.723610

KEYWORDS: Electrodes, Transducers, Silicon, Ultrasonics, Ultrasonography, Signal generators, Micromachining, Resonators, Anisotropic etching, Etching

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Keywords/Phrases