Chen Chen
at Purdue Univ
SPIE Involvement:
Author
Publications (6)

Proceedings Article | 31 August 2017 Presentation + Paper
Proc. SPIE. 10354, Nanoengineering: Fabrication, Properties, Optics, and Devices XIV
KEYWORDS: Defense and security, Semiconductors, Nanostructures, Optical lithography, Medicine, Data storage, Molecules, Silicon, Manufacturing, Semiconductor manufacturing

Proceedings Article | 29 August 2017 Presentation + Paper
Proc. SPIE. 10353, Optical Sensing, Imaging, and Photon Counting: Nanostructured Devices and Applications 2017
KEYWORDS: Thermography, Plasmonics, Polarization, Sensors, Nanoparticles, Luminescence, Thermometry, Charge-coupled devices, Temperature metrology, Anisotropy

Proceedings Article | 25 August 2017 Presentation + Paper
Proc. SPIE. 10346, Plasmonics: Design, Materials, Fabrication, Characterization, and Applications XV
KEYWORDS: Lithography, Plasmonics, Electron beam lithography, Electron beams, Surface plasmons, Optical lithography, Lenses, Photoresist materials, Photomasks, Semiconducting wafers

Proceedings Article | 27 April 2017 Presentation
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Plasmonics, Surface plasmons, Optical lithography, Lenses, Maskless lithography, Semiconducting wafers, Nanolithography, Beam controllers

Proceedings Article | 22 March 2016 Paper
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Plasmonics, Electron beam lithography, Electron beams, Optical lithography, Silica, Lenses, Electrodes, Dielectrics, Chromium, 3D modeling, Photoresist materials, Photomasks, Beam shaping, Maskless lithography, Reactive ion etching, Semiconducting wafers, Tolerancing

Showing 5 of 6 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top