The PXM (Projection X-ray Microscope) end station was used to complete a preliminary test at the SPring-8 12B2 beamline. The x-ray through scintillator and knife-edge become visible-light image can get from the sensor. The knifeedge image has an edge shape, which can create the edge response line. The edge response line can be differentiated from the point response line. The point response line can then be transferred by Fourier transformation, and achieve MTF (Modulation Transfer Function). Here we apply Chebyshev polynomials to fit the edge response line and calculate the MTF. We used 20× and 50× objective lenses to generate the knife-edge images and calculate the MTF value. We found that the scintillator design resolution is 1 μm, and following the MTF calculation, the image resolutions are about 3 μm and 1.4 μm in the 20× and 50× objective lens, respectively.
The project of transmission x-ray microscope (TXM) with tender x-ray is undergoing as an extension project of the soft x-ray tomography (SXT) endstation at Taiwan Photon Source (TPS). This TXM is aimed for energy from 1.5 keV to 2.4 keV and with phase contrast with the x-ray energy of 2.4 keV. As the extension of current SXT project, the beamline will be equipped with a variable line spacing (VLS) grating with the multi-layer coating which will be optimized for 2.4 keV.
This TXM will be zoneplate based with a phase ring and capillary condenser. In order to match the field of view and numerical aperture (NA) of zoneplate with the emittance of the source in vertical direction, some compromise should be made. To match the low emittance of vertical direction, the NA of zoneplate should be lower and vertical of the secondary source should be larger. This will lower spatial resolution and energy resolution. The targeting resolution of this TXM for phase contrast will be 50nm and FOV is 20 μm. For the detector, which is currently design with a scintillator with a CCD detector. For the future, the direct detector for small pixel and high signal to noise ratio can be obtained. The other components of TXM, such as stages, cryo system, which can be shared with current SXT system which works under the energy of the water window region.
This endstation for tender X-ray will be commission in 2020. The detailed design and current progress will be discussed in this presentation.