Mr. Cheng Liao Profile

Cheng Liao

at Wuhan Univ of Science and Technology

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Publications (1)

Proceedings Article | 20 December 2019 Paper

Particle scattering field calculation and analysis based on Mie scattering theory

Cheng Liao, Shuang Xu, Zhenyuan Xia, Ruyi Ma

Proceedings Volume 11209, 112094N (2019) https://doi.org/10.1117/12.2549918

KEYWORDS: Light scattering, Particles, Scattering, Mie scattering, Semiconducting wafers, Polarization, Diffraction, Defect detection, Laser scattering, Rayleigh scattering

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