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Jun Cheng
at Univ of Shanghai for Science and Technology
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Author
Publications (4)
Proceedings Article | 19 December 2022 Poster + Paper
Research on interferometric inspection of surface topography of ring elements
Proceedings Volume 12319, 123191F (2022) https://doi.org/10.1117/12.2643403
KEYWORDS: Inspection, Interferometers, Interferometry, Technology, Spherical lenses, Design and modelling, Optical components, Equipment, Mirrors, Metals
Proceedings Article | 19 December 2022 Poster + Paper
Interferometric measurement of thickness variation of double-sided polished wafer
Proceedings Volume 12319, 123191B (2022) https://doi.org/10.1117/12.2643049
KEYWORDS: Semiconducting wafers, Interferometers, Polishing, Phase interferometry, Photovoltaics, Surface finishing, Interferometry, Wafer bonding, Reliability, Phase shifts
Proceedings Article | 19 December 2022 Poster + Paper
Simulation verification for the cause of overlapped interference fringes in homogeneity measurement of quartz substrate
Proceedings Volume 12319, 123191D (2022) https://doi.org/10.1117/12.2643369
KEYWORDS: Quartz, Beam expanders, Beam splitters, Wavefronts, Interferometers, Photomasks, Optical components, Fizeau interferometers, Collimation, Zemax
Proceedings Article | 19 December 2022 Poster + Paper
Simulation research of illumination system with coherent noise suppression
Proceedings Volume 12319, 123191A (2022) https://doi.org/10.1117/12.2642907
KEYWORDS: Light sources, Scattering, Interferometry, Interferometers, Light scattering, Fizeau interferometers, Light, Beam splitters, Laser scattering, Sensors
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