Dr. Chester Chien
Metrology Dev Manager at Western Digital Corp
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proc. SPIE. 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV
KEYWORDS: Metrology, Image processing, Scanning electron microscopy, 3D metrology, Machine vision, Machine learning, High volume manufacturing, Critical dimension metrology, Semiconducting wafers, 3D image processing

Proceedings Article | 20 March 2020 Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Electron beams, Metrology, Error analysis, Ions, Magnetism, Scanning electron microscopy, Head, Ion beams, 3D metrology, Process control, Semiconducting wafers, Wafer manufacturing, Hardware product development

Proceedings Article | 21 May 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Principal component analysis, Data modeling, Manufacturing, Magnetism, Process control, Neural networks, Semiconducting wafers, Data integration, Instrument modeling

Proceedings Article | 23 April 2018 Presentation + Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Inspection, Scanning electron microscopy, Image quality, Image filtering, Neural networks, Machine learning, Image classification, Critical dimension metrology

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Scanning electron microscopy, Transmission electron microscopy, Image processing software, 3D metrology, Process control, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers

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