Mr. Chi-Hong Tung Profile

Chi-Hong Tung

at Industrial Technology Research Institute

SPIE Involvement:

Author

Publications (9)

Proceedings Article | 21 September 2007 Paper

A hybrid phase unwrapping method for correction the error

Yong-Tong Zou, Chi-Hong Tung, Calvin Chang

Proceedings Volume 6672, 66720S (2007) https://doi.org/10.1117/12.731429

KEYWORDS: Phase shifts, Beam splitters, Phase interferometry, Interferometry, Interferometers, Error analysis, Profiling, Diffraction, Reliability, 3D metrology

Read Abstract +

Proceedings Article | 11 September 2007 Paper

Auto-scanning white-light interferometer

Jin-Liang Chen, Chi-Hong Tung, Ching-Fen Kao, Calvin Chang

Proceedings Volume 6672, 667204 (2007) https://doi.org/10.1117/12.733625

KEYWORDS: Beam splitters, Interferometers, Interferometry, Calibration, Charge-coupled devices, Light sources, Actuators, Image processing, 3D metrology, LCDs

Read Abstract +

Proceedings Article | 5 April 2007 Paper

In-chip overlay metrology of 45nm and 55nm processes

Y. S. Ku, C. H. Tung, Y. P. Li, H. L. Pang, C. M. Ke, Y. H. Wang, D. C. Huang, N. P. Smith, L. Binns

Proceedings Volume 6518, 65182V (2007) https://doi.org/10.1117/12.713075

KEYWORDS: Overlay metrology, Semiconducting wafers, Calibration, Data modeling, Mathematical modeling, Wafer testing, Reticles, Tolerancing, Error analysis, Process control

Read Abstract +

Proceedings Article | 14 August 2006 Paper

Fast surface profiling using monochromatic phase and fringe order in white-light interferometry

Chi-Hong Tung, Chiung-Huei Huang, Ching-Fen Kao, Calvin Chang

Proceedings Volume 6292, 62921F (2006) https://doi.org/10.1117/12.678899

KEYWORDS: Interferometry, Beam splitters, Light sources, Optical filters, Error analysis, Time metrology, Profiling, Mirrors, Objectives, Charge-coupled devices

Read Abstract +

Proceedings Article | 24 March 2006 Paper

In-chip overlay metrology

Y. Ku, C. Tung, Y. Li, H. Pang, N. Smith, L. Binns, T. Rigden, G. Reynolds, H. Fink

Proceedings Volume 6152, 615214 (2006) https://doi.org/10.1117/12.655953

KEYWORDS: Overlay metrology, Data modeling, Scanning electron microscopy, Image processing, Process control, Image resolution, Semiconducting wafers, Tolerancing, Lithography, Image acquisition

Read Abstract +

Proceedings Article | 10 May 2005 Paper

Performance study of CD mark size for angular scatterometry

Yi-sha Ku, Ding-Sheng Pan, Shih-Chun Wang, C. Tung, Chun-Hung Ko, Sheng-Hua Lu, Nigel Smith

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599188

KEYWORDS: Scattering, Scatterometry, Critical dimension metrology, Laser scattering, Overlay metrology, Light scattering, Scatter measurement, Optical design, Interference (communication), Semiconducting wafers

Read Abstract +

Proceedings Article | 10 May 2005 Paper

Improved thin film model for overlay metrology

Chi-Hong Tung, Yi-Sha Ku, An-Shun Liu, Nigel Smith

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599274

KEYWORDS: Overlay metrology, Thin films, Silicon, Silicon films, 3D modeling, Optical simulations, Diffraction gratings, Reflectivity, Diffraction, Optical filters

Read Abstract +

Proceedings Article | 10 May 2005 Paper

In-chip overlay measurement by existing bright-field imaging optical tools

Yi-Sha Ku, Chi-Hong Tung, Nigel Smith

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599054

KEYWORDS: Overlay metrology, Semiconducting wafers, Lithography, Silicon, Optical imaging, Image resolution, Imaging systems, Quality measurement, Detection and tracking algorithms, Integrated optics

Read Abstract +

Proceedings Article | 2 August 2004 Paper

A white-light profiling algorithm adopting the multiwavelength interferometric technique

Hua-Chen Hsu, Chi-Hong Tung, Ching-Fen Kao, Calvin Chang

Proceedings Volume 5531, (2004) https://doi.org/10.1117/12.559251

KEYWORDS: Beam splitters, Interferometry, Light sources, Profiling, Phase interferometry, Interferometers, Phase shifts, Objectives, Actuators, Algorithm development

Read Abstract +

Showing 5 of 9 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years