Prof. Chi Hsiang Pan Profile

Prof. Chi Hsiang Pan

Associate Professor at National Chin-Yi Institute of Technology

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Publications (2)

SPIE Journal Paper | 1 July 2005

Design and fabrication of an electro-thermal microactuator with multidirectional in-plane motion

Chi Pan, Chia-Lung Chang, Yi-Kun Chen

JM3, Vol. 4, Issue 03, 033008, (July 2005) https://doi.org/10.1117/12.10.1117/1.2040448

KEYWORDS: Microactuators, Actuators, Silicon, Convection, Fabrication, Doping, 3D modeling, Low pressure chemical vapor deposition, Micromachining

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Proceedings Article | 16 August 2004 Paper

An in situ test structure for simultaneously determining multimaterial properties of a film

Chi Hsiang Pan

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.545231

KEYWORDS: Calibration, Silicon films, Silicon, Microelectromechanical systems, Remote sensing, Micromachining, Low pressure chemical vapor deposition, Thin films, Fabrication, Plasma enhanced chemical vapor deposition

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