Chia Hua Lin
Engineer at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 29 March 2013 Paper
Proc. SPIE. 8682, Advances in Resist Materials and Processing Technology XXX
KEYWORDS: Optical lithography, Contamination, Polymers, Diffusion, Manufacturing, Printing, Compact discs, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 21 April 2011 Paper
Proc. SPIE. 7971, Metrology, Inspection, and Process Control for Microlithography XXV
KEYWORDS: Optical lithography, Etching, Image processing, Coating, Reflectivity, Printing, Photomasks, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Proceedings Article | 29 January 2007 Paper
Proc. SPIE. 6508, Visual Communications and Image Processing 2007
KEYWORDS: Radon, Detection and tracking algorithms, Video, Digital filtering, Silver, Computer programming, Motion models, Performance modeling, Motion estimation, Scalable video coding

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