Prof. Chien-Chung Fu
at National Tsing Hua Univ
SPIE Involvement:
Publications (11)

Proceedings Article | 23 March 2020 Paper
Proc. SPIE. 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020
KEYWORDS: Homogenization, Medical laser equipment, Microlens array, Two photon polymerization, Laser processing, Laser applications, Laser drilling, Diffusers, Optical simulations, Laser based displays

Proceedings Article | 4 March 2019 Presentation
Proc. SPIE. 10883, Three-Dimensional and Multidimensional Microscopy: Image Acquisition and Processing XXVI
KEYWORDS: Confocal microscopy, Super resolution, 3D imaging standards, Tissues, Imaging systems, Data storage, Luminescence, Image resolution, Tomography, 3D image processing

Proceedings Article | 22 February 2018 Paper
Proc. SPIE. 10539, Photonic Instrumentation Engineering V
KEYWORDS: Optical design, CMOS sensors, Lenses, Cameras, Image resolution, Distortion, Lens design, Image sensors, Modulation transfer functions, Spatial resolution

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Lithography, Light sources, Optical lithography, Laser development, Photoresist materials, Vibrometry, Sapphire, Nanoimprint lithography, Semiconducting wafers, Laser systems engineering

Proceedings Article | 28 March 2017 Paper
Proc. SPIE. 10147, Optical Microlithography XXX
KEYWORDS: Lithography, Nanostructures, Electron beam lithography, Optical lithography, Wavefronts, Scanning electron microscopy, Vibration control, Maskless lithography, Optical choppers, Nanolithography

Showing 5 of 11 publications
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