Mr. Chih-Chieh Yu Profile

Chih-Chieh Yu

Project Manager at Macronix International Co Ltd

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Publications (2)

Proceedings Article | 12 April 2013 Paper

SMO and NTD for robust single exposure solution on contact patterning for 40nm node flash memory devices

Chih-Chieh Yu, C. C. Yang, Elvis Yang, T. H. Yang, K. C. Chen, Chih-Yuan Lu

Proceedings Volume 8683, 868322 (2013) https://doi.org/10.1117/12.2010736

KEYWORDS: Photomasks, SRAF, Source mask optimization, Semiconducting wafers, Optical lithography, Critical dimension metrology, Electroluminescence, Immersion lithography, Manufacturing, Image processing

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Proceedings Article | 19 March 2012 Paper

Pattern dependent satellite defects in via lithography

Chih-Chieh Yu, Mars Yang, Elvis Yang, T. Yang, K. Chen, Chih-Yuan Lu

Proceedings Volume 8325, 83252K (2012) https://doi.org/10.1117/12.915572

KEYWORDS: Satellites, Semiconducting wafers, Photomasks, Lithography, Polymers, Standards development, Photoresist processing, Inspection, Optical lithography, Etching

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