Chih-Chieh Yu
Project Manager at Macronix International Co Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 12 April 2013 Paper
Proc. SPIE. 8683, Optical Microlithography XXVI
KEYWORDS: Optical lithography, Image processing, Manufacturing, Electroluminescence, Photomasks, Immersion lithography, Source mask optimization, SRAF, Critical dimension metrology, Semiconducting wafers

Proceedings Article | 19 March 2012 Paper
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Lithography, Optical lithography, Etching, Satellites, Polymers, Inspection, Photomasks, Photoresist processing, Semiconducting wafers, Standards development

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