Mr. Chih-Yang Sheng Profile

Chih-Yang Sheng

at National Taipei Univ of Technology

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 16 November 2011 Paper

An embedded image processing and feedback compensation for the vibration-resistance system using white light interferometer

Stephen P. Tseng, Liang-Chia Chen, Calvin Ho, Chih-Yang Sheng

Proceedings Volume 8321, 83212H (2011) https://doi.org/10.1117/12.905061

KEYWORDS: Interferometers, Image processing, Ferroelectric materials, Embedded systems, Charge-coupled devices, Phase shifts, Cameras, Control systems, Interfaces, Data communications

Read Abstract +

The active interferometer has been approved as an effective architecture to increase the precision of surface profile measurement by detecting the environmental vibration and then stabilized by a piezoelectric transducer. The performance of such system can improve the accuracy within nano-meters. Most of the active interferometers have being implemented on the PC based platform because it is easy to be setup and modulized, However, the latency of image grabbing processing, mathematic algorithm and I/O trigger delay is around 10~15ms. Moreover, the latency is varying if different PCs are used. In this study, an embedded real-time controller based on the ADI Blackfin BF561 DSP microprocessor was developed to improve the performance of a vibration-resistance system using white-light interferometer. The purpose of this embedded control system is to detect the vibration and compensate it for White Light Interferometer when processing stepping photograph grabbing for surface profile measurement. A customized embedded control system with a 600 MHz high performance microprocessor, Camera Link interface, DAC circuit and UART command port has been developed. A complete command set has also been defined to communicate with PC based interferometer user interface for close-loop control. The latency has been reduced from tens of millimeters to 250 μs as tested for all the procedures from CCD trigger, image processing, to PZT control signal output. It has been proved to be useful of fixing the latency between phase detecting and compensation output. With this advantage, the response of the interferometer can accelerated so that the vibration-resistance is improved and the overall accuracy can be in the range of a few nano-meters.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years